MOSIS PARAMETRIC TEST RESULTS RUN: N88Y VENDOR: TSMC TECHNOLOGY: SCN035H FEATURE SIZE: 0.35 microns INTRODUCTION: This report contains the lot average results obtained by MOSIS from measurements of MOSIS test structures on each wafer of this fabrication lot. SPICE parameters obtained from similar measurements on a selected wafer are also attached. COMMENTS: SMSCN3ME04 TRANSISTOR PARAMETERS W/L N-CHANNEL P-CHANNEL UNITS MINIMUM 0.60/0.4 Vth 0.54 -0.77 Volts SHORT 3.6/0.4 Idss 485 -218 uA/um Vth 0.58 -0.76 Volts Vpt 9.6 -8.9 Volts WIDE 10/0.4 -10.0 Volts Ids0 7.1 -0.4 pA/um LARGE 3.6/3.6 Vth 0.55 -0.76 Volts Vjbkd 8.8 -8.2 Volts Ijlk -35.3 -7.2 pA Gamma 0.62 0.39 V^0.5 Delta length -0.05 -0.10 microns (drawn - electrical) Delta width 0.15 0.10 microns (drawn - electrical) K' (Uo*Cox/2) 94.4 -33.3 uA/V^2 COMMENTS: DL_TSMC_035 FOX TRANSISTORS GATE N+ACTIVE P+ACTIVE UNITS Vth Poly >15.0 <-15.0 Volts PROCESS PARAMETERS N+ACTV P+ACTV POLY POLY2 MTL1 MTL2 MTL3 UNITS Sheet Resistance 79.1 153.4 7.4 47.4 0.07 0.07 0.04 ohms/sq Width Variation 0.01 0.05 0.04 -0.24 0.11 -0.03 -0.03 microns (measured - drawn) Contact Resistance 54.8 118.5 5.6 31.4 1.31 1.42 ohms Gate Oxide Thickness 76 angstrom PROCESS PARAMETERS N_WELL N\PLY UNITS Sheet Resistance 1011 1081 ohms/sq Width Variation microns (measured - drawn) Contact Resistance ohms COMMENTS: N\POLY is N-well under polysilicon. CAPACITANCE PARAMETERS N+ACTV P+ACTV POLY POLY2 MTL1 MTL2 MTL3 N_WELL UNITS Area (substrate) 921 1408 117 23 11 6 55 aF/um^2 Area (N+active) 4562 1035 28 16 11 aF/um^2 Area (P+active) 4561 635 aF/um^2 Area (poly) 894 46 15 9 aF/um^2 Area (poly2) 44 aF/um^2 Area (metal1) 36 13 aF/um^2 Area (metal2) 36 aF/um^2 Fringe (substrate) 299 385 54 30 31 aF/um Fringe (poly) 61 37 28 aF/um Fringe (metal1) 56 35 aF/um Fringe (metal2) 53 aF/um Overlap (N+active) 306 aF/um Overlap (P+active) 590 aF/um CIRCUIT PARAMETERS UNITS Inverters K Vinv 1.0 1.25 Volts Vinv 1.5 1.39 Volts Vol (100 uA) 2.0 0.34 Volts Voh (100 uA) 2.0 2.84 Volts Vinv 2.0 1.48 Volts Gain 2.0 -19.75 Ring Oscillator Freq. DIV4 (31-stage,3.3V) 196.17 MHz Ring Oscillator Power DIV4 (31-stage,3.3V) 5.83 uW/MHz/g COMMENTS: SUBMICRON N88Y SPICE BSIM3 VERSION 3.1 (HSPICE Level 49) PARAMETERS * DATE: Oct 30/98 * LOT: n88y WAF: 11 * Temperature_parameters=Default .MODEL CMOSN NMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 7.6E-9 +XJ = 1.5E-7 NCH = 1.7E17 VTH0 = 0.4964448 +K1 = 0.5307769 K2 = 0.0199705 K3 = 0.2963637 +K3B = 0.2012165 W0 = 2.836319E-6 NLX = 2.894802E-7 +DVT0W = 0 DVT1W = 5.3E6 DVT2W = -0.032 +DVT0 = 0.112017 DVT1 = 0.2453972 DVT2 = -0.171915 +U0 = 444.9381976 UA = 2.921284E-10 UB = 1.773281E-18 +UC = 7.067896E-11 VSAT = 1.130785E5 A0 = 1.1356246 +AGS = 0.2810374 B0 = 2.844393E-7 B1 = 5E-6 +KETA = -7.8181E-3 A1 = 0 A2 = 1 +RDSW = 925.2701982 PRWG = -1E-3 PRWB = -1E-3 +WR = 1 WINT = 7.186965E-8 LINT = 1.735515E-9 +XL = 0 XW = 0 DWG = -1.712973E-8 +DWB = 5.851691E-9 VOFF = -0.132935 NFACTOR = 0.5710974 +CIT = 0 CDSC = 8.607229E-4 CDSCD = 0 +CDSCB = 0 ETA0 = 2.128321E-3 ETAB = 0 +DSUB = 0.0257957 PCLM = 0.6766314 PDIBLC1 = 1 +PDIBLC2 = 1.787424E-3 PDIBLCB = 0 DROUT = 0.7873539 +PSCBE1 = 6.973485E9 PSCBE2 = 1.46235E-7 PVAG = 0.05 +DELTA = 0.01 MOBMOD = 1 PRT = 0 +UTE = -1.5 KT1 = -0.11 KT1L = 0 +KT2 = 0.022 UA1 = 4.31E-9 UB1 = -7.61E-18 +UC1 = -5.6E-11 AT = 3.3E4 WL = 0 +WLN = 1 WW = 0 WWN = 1 +WWL = 0 LL = 0 LLN = 1 +LW = 0 LWN = 1 LWL = 0 +CAPMOD = 2 CGDO = 1.96E-10 CGSO = 1.96E-10 +CGBO = 0 CJ = 9.276962E-4 PB = 0.8157962 +MJ = 0.3557696 CJSW = 3.181055E-10 PBSW = 0.6869149 +MJSW = 0.1 PVTH0 = -0.0252481 PRDSW = -96.4502805 +PK2 = -4.805372E-3 WKETA = -7.643187E-4 LKETA = -0.0129496 ) * .MODEL CMOSP PMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 7.6E-9 +XJ = 1.5E-7 NCH = 1.7E17 VTH0 = -0.6636594 +K1 = 0.4564781 K2 = -0.019447 K3 = 39.382919 +K3B = -2.8930965 W0 = 2.655585E-6 NLX = 1.51028E-7 +DVT0W = 0 DVT1W = 5.3E6 DVT2W = -0.032 +DVT0 = 1.1744581 DVT1 = 0.7631128 DVT2 = -0.1035171 +U0 = 151.3305606 UA = 2.061211E-10 UB = 1.823477E-18 +UC = -8.97321E-12 VSAT = 9.915604E4 A0 = 1.1210053 +AGS = 0.3961954 B0 = 6.493139E-7 B1 = 4.273215E-6 +KETA = -9.27E-3 A1 = 0 A2 = 1 +RDSW = 2.30725E3 PRWG = -1E-3 PRWB = 0 +WR = 1 WINT = 5.962233E-8 LINT = 4.30928E-9 +XL = 0 XW = 0 DWG = -1.596201E-8 +DWB = 1.378919E-8 VOFF = -0.15 NFACTOR = 2 +CIT = 0 CDSC = 6.593084E-4 CDSCD = 0 +CDSCB = 0 ETA0 = 0.0286461 ETAB = 0 +DSUB = 0.2436027 PCLM = 4.3597508 PDIBLC1 = 7.447024E-4 +PDIBLC2 = 4.256073E-3 PDIBLCB = 0 DROUT = 0.0120292 +PSCBE1 = 1.347622E10 PSCBE2 = 5E-9 PVAG = 3.669793 +DELTA = 0.01 MOBMOD = 1 PRT = 0 +UTE = -1.5 KT1 = -0.11 KT1L = 0 +KT2 = 0.022 UA1 = 4.31E-9 UB1 = -7.61E-18 +UC1 = -5.6E-11 AT = 3.3E4 WL = 0 +WLN = 1 WW = 0 WWN = 1 +WWL = 0 LL = 0 LLN = 1 +LW = 0 LWN = 1 LWL = 0 +CAPMOD = 2 CGDO = 2.307E-10 CGSO = 2.307E-10 +CGBO = 0 CJ = 1.420282E-3 PB = 0.99 +MJ = 0.5490877 CJSW = 4.773605E-10 PBSW = 0.99 +MJSW = 0.1997417 PVTH0 = 6.58707E-3 PRDSW = -93.5582228 +PK2 = 1.011593E-3 WKETA = -0.0101398 LKETA = 6.027967E-3 ) *