MOSIS PARAMETRIC TEST RESULTS RUN: N7CU VENDOR: HP-NID TECHNOLOGY: SCN035H FEATURE SIZE: 0.35 microns INTRODUCTION: This report contains the lot average results obtained by MOSIS from measurements of MOSIS test structures on each wafer of this fabrication lot. SPICE parameters obtained from similar measurements on a selected wafer are also attached. COMMENTS: Hewlett Packard GMOS10QA. TRANSISTOR PARAMETERS W/L N-CHANNEL P-CHANNEL UNITS MINIMUM 0.60/0.4 Vth 0.73 -0.66 Volts SHORT 3.6/0.4 Vth 0.74 -0.68 Volts Vpt 10.0 -8.8 Volts Vbkd 9.4 -6.9 Volts Idss 494 -252 uA/um WIDE 10/0.4 Ids0 1.2 -0.4 pA/um LARGE 3.6/3.6 Vth 0.74 -0.72 Volts Vjbkd 9.3 -8.4 Volts Ijlk -21.5 -4.6 pA Gamma 0.48 0.55 V^0.5 Delta length -0.06 0.08 microns (L_eff = L_drawn-DL) Delta width 0.21 0.16 microns (W_eff = W_drawn-DW) K' (Uo*Cox/2) 108.8 -24.0 uA/V^2 COMMENTS: Delta L varies with design technology as a result of the different mask biases applied for each technology. Please adjust the delta L in this report to reflect the actual design technology of your submission. Design Technology Delta L ----------------- ------- SCN4M_SUBM (lambda=0.2), HP_CMOS10QA no adjustment SCN4M (lambda=0.25) subtract 0.1 um FOX TRANSISTORS GATE N+ACTIVE P+ACTIVE UNITS Vth Poly >15.0 <-15.0 Volts PROCESS PARAMETERS N+ACTV P+ACTV POLY MTL1 MTL2 MTL3 MTL4 UNITS Sheet Resistance 3.1 2.8 2.6 0.06 0.06 0.06 0.03 ohms/sq Width Variation -0.16 -0.12 -0.00 -0.02 -0.12 -0.16 0.04 microns (measured - drawn) Contact Resistance 2.8 2.7 2.4 0.90 0.69 0.90 ohms Gate Oxide Thickness 76 angstrom PROCESS PARAMETERS N\PLY N_WELL UNITS Sheet Resistance 1422 1393 ohms/sq Width Variation microns (measured - drawn) Contact Resistance ohms COMMENTS: N\POLY is N-well under polysilicon. CAPACITANCE PARAMETERS N+ACTV P+ACTV POLY MTL1 MTL2 MTL3 MTL4 N_WELL UNITS Area (substrate) 934 857 88 32 14 7 5 92 aF/um^2 Area (N+active) 4550 49 20 13 11 aF/um^2 Area (P+active) 4558 aF/um^2 Area (poly) 78 19 11 7 aF/um^2 Area (metal1) 42 15 9 aF/um^2 Area (metal2) 40 15 aF/um^2 Area (metal3) 42 aF/um^2 Fringe (substrate) 177 166 40 19 18 25 aF/um Fringe (N+active) 473 aF/um Fringe (P+active) 508 aF/um Fringe (poly) 70 42 31 25 aF/um Fringe (metal1) 61 36 29 aF/um Fringe (metal2) 57 37 aF/um Fringe (metal3) 55 aF/um CIRCUIT PARAMETERS UNITS Inverters K Vinv 1.0 1.36 Volts Vinv 1.5 1.50 Volts Vol (100 uA) 2.0 0.22 Volts Voh (100 uA) 2.0 3.00 Volts Vinv 2.0 1.60 Volts Gain 2.0 -20.82 Ring Oscillator Freq. DIV4 (31-stage,3.3V) 206.35 MHz Ring Oscillator Power DIV4 (31-stage,3.3V) 5.49 uW/MHz/g SPICE LEVEL2/LEVEL3 parameters not available. N7CU SPICE BSIM3 VERSION 3.1 (HSPICE Level 49) PARAMETERS * DATE: May 20/98 * LOT: N7CU WAF: 23 .MODEL CMOSN NMOS LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 7.6E-9 +XJ = 1.5E-7 NCH = 1.7E17 VTH0 = 0.5710859 +K1 = 0.878501 K2 = -0.0300243 K3 = 11.3113085 +K3B = -0.3965833 W0 = 1E-5 NLX = 1.457884E-7 +DVT0W = 0 DVT1W = 5.3E6 DVT2W = -0.032 +DVT0 = 7.4122244 DVT1 = 0.8466786 DVT2 = -0.0431829 +U0 = 392.1337916 UA = 2.772806E-10 UB = 1.277294E-18 +UC = 5.063058E-11 VSAT = 1.232875E5 A0 = 0.900086 +AGS = 0.2495782 B0 = 3.808501E-8 B1 = 1.022E-6 +KETA = -0.0935 A1 = 0 A2 = 1 +RDSW = 832.2247571 PRWG = -1.1278E-3 PRWB = -1.035E-3 +WR = 1 WINT = 1.074592E-7 LINT = 4.844866E-8 +DWG = -1.076457E-8 DWB = 5.072102E-9 VOFF = -0.15 +NFACTOR = 2 CIT = 0 CDSC = 2.4E-4 +CDSCD = 0 CDSCB = 0 ETA0 = 0.023341 +ETAB = 0 DSUB = 0.3151379 PCLM = 0.7954879 +PDIBLC1 = 2.0677E-3 PDIBLC2 = 1.499374E-3 PDIBLCB = 0 +DROUT = 0.0263371 PSCBE1 = 6.472592E9 PSCBE2 = 5.003116E-9 +PVAG = 0.1858763 DELTA = 0.01 MOBMOD = 1 +PRT = 0 UTE = -1.5 KT1 = -0.11 +KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9 +UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4 +WL = 0 WLN = 1 WW = 0 +WWN = 1 WWL = 0 LL = 0 +LLN = 1 LW = 0 LWN = 1 +LWL = 0 CAPMOD = 2 CGDO = 4.7E-10 +CGSO = 4.7E-10 CGBO = 0 CJ = 9.3406E-4 +PB = 0.83492 MJ = 0.3779 CJSW = 2.0983E-10 +PBSW = 0.83492 MJSW = 0.39887 PVTH0 = -7.594092E-3 +PRDSW = -83.6700093 PK2 = -2.428668E-3 WKETA = -0.0203354 +LKETA = -0.015649 * * .MODEL CMOSP PMOS LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 7.6E-9 +XJ = 1.5E-7 NCH = 1.7E17 VTH0 = -0.6337919 +K1 = 0.9029167 K2 = -0.034687 K3 = 15.6544439 +K3B = -0.414614 W0 = 1E-5 NLX = 8.659181E-8 +DVT0W = 0 DVT1W = 5.3E6 DVT2W = -0.032 +DVT0 = 2.2415808 DVT1 = 0.4774944 DVT2 = -0.1499976 +U0 = 126.7415765 UA = 1.546932E-9 UB = 3.574984E-19 +UC = -9.25937E-11 VSAT = 1.400982E5 A0 = 0.9155035 +AGS = 0.2126518 B0 = 3.11251E-8 B1 = -5.650557E-7 +KETA = -0.13927 A1 = 0 A2 = 1 +RDSW = 1.833498E3 PRWG = -4.479053E-3 PRWB = -5E-3 +WR = 1 WINT = 1.06155E-7 LINT = 6.896986E-8 +DWG = -1.056462E-8 DWB = 2.438224E-9 VOFF = -0.15 +NFACTOR = 2 CIT = 0 CDSC = 6.593084E-4 +CDSCD = 0 CDSCB = 0 ETA0 = 0.0492433 +ETAB = 0 DSUB = 0.5 PCLM = 2.0919478 +PDIBLC1 = 2.247498E-3 PDIBLC2 = 1.238699E-3 PDIBLCB = 0 +DROUT = 0.0580951 PSCBE1 = 4.785273E9 PSCBE2 = 5.406486E-9 +PVAG = 1.8146291 DELTA = 0.01 MOBMOD = 1 +PRT = 0 UTE = -1.5 KT1 = -0.11 +KT1L = 0 KT2 = 0.022 UA1 = 4.31E-9 +UB1 = -7.61E-18 UC1 = -5.6E-11 AT = 3.3E4 +WL = 0 WLN = 1 WW = 0 +WWN = 1 WWL = 0 LL = 0 +LLN = 1 LW = 0 LWN = 1 +LWL = 0 CAPMOD = 2 CGDO = 4.5E-10 +CGSO = 4.5E-10 CGBO = 0 CJ = 8.6341E-4 +PB = 0.99 MJ = 0.56727 CJSW = 1.8343E-10 +PBSW = 0.99 MJSW = 0.36665 PVTH0 = 1.840766E-3 +PRDSW = -165.4749549 PK2 = -5.732675E-3 WKETA = -1.57284E-3 +LKETA = 5.75928E-3 * * Download Text File