MOSIS PARAMETRIC TEST RESULTS RUN: N88W VENDOR: HP-NID TECHNOLOGY: SCN035H FEATURE SIZE: 0.35 microns INTRODUCTION: This report contains the lot average results obtained by MOSIS from measurements of MOSIS test structures on each wafer of this fabrication lot. SPICE parameters obtained from similar measurements on a selected wafer are also attached. COMMENTS: Hewlett Packard GMOS10QA. TRANSISTOR PARAMETERS W/L N-CHANNEL P-CHANNEL UNITS MINIMUM 0.60/0.4 Vth 0.62 -0.61 Volts SHORT 3.6/0.4 Idss 480 -206 uA/um Vth 0.62 -0.61 Volts Vpt 10.0 -6.8 Volts WIDE 10/0.4 -8.6 Volts Ids0 1.0 -0.2 pA/um LARGE 3.6/3.6 Vth 0.57 -0.62 Volts Vjbkd 9.6 -8.3 Volts Ijlk -38.2 -0.5 pA Gamma 0.64 0.59 V^0.5 Delta length -0.02 0.04 microns (drawn - electrical) Delta width 0.14 0.08 microns (drawn - electrical) K' (Uo*Cox/2) 90.9 -21.9 uA/V^2 COMMENTS: Delta L varies with design technology as a result of the different mask biases applied for each technology. Please adjust the delta L in this report to reflect the actual design technology of your submission. Design Technology Delta L ----------------- ------- SCN4M_SUBM (lambda=0.2), HP_GMOS10QA no adjustment FOX TRANSISTORS GATE N+ACTIVE P+ACTIVE UNITS Vth Poly >15.0 <-15.0 Volts PROCESS PARAMETERS N+ACTV P+ACTV POLY MTL1 MTL2 MTL3 MTL4 UNITS Sheet Resistance 3.0 2.3 2.5 0.06 0.06 0.06 0.03 ohms/sq Width Variation -0.10 -0.09 0.10 0.02 -0.04 -0.07 0.04 microns (measured - drawn) Contact Resistance 2.7 2.3 2.2 1.01 0.92 0.81 ohms Gate Oxide Thickness 79 angstrom PROCESS PARAMETERS N\PLY N_WELL UNITS Sheet Resistance 1404 1355 ohms/sq Width Variation microns (measured - drawn) Contact Resistance ohms COMMENTS: N\POLY is N-well under polysilicon. CAPACITANCE PARAMETERS N+ACTV P+ACTV POLY MTL1 MTL2 MTL3 MTL4 N_WELL UNITS Area (substrate) 923 856 90 29 13 7 5 87 aF/um^2 Area (N+active) 4353 44 18 12 10 aF/um^2 Area (P+active) 4344 aF/um^2 Area (poly) 67 17 10 7 aF/um^2 Area (metal1) 37 14 9 aF/um^2 Area (metal2) 37 14 aF/um^2 Area (metal3) 38 aF/um^2 Fringe (substrate) 190 198 42 21 19 26 aF/um Fringe (poly) 60 39 30 24 aF/um Fringe (metal1) 62 36 27 aF/um Fringe (metal2) 57 35 aF/um Fringe (metal3) 48 aF/um Overlap (N+active) 397 aF/um Overlap (P+active) 473 aF/um CIRCUIT PARAMETERS UNITS Inverters K Vinv 1.0 1.28 Volts Vinv 1.5 1.42 Volts Vol (100 uA) 2.0 0.21 Volts Voh (100 uA) 2.0 2.97 Volts Vinv 2.0 1.52 Volts Gain 2.0 -24.76 Ring Oscillator Freq. DIV4 (31-stage,3.3V) 176.09 MHz Ring Oscillator Power DIV4 (31-stage,3.3V) 5.68 uW/MHz/g COMMENTS: SUBMICRON N88W SPICE BSIM3 VERSION 3.1 (HSPICE Level 49) PARAMETERS * DATE: Nov 16/98 * LOT: n88w WAF: 11 * Temperature_parameters=Default .MODEL CMOSN NMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 7.9E-9 +XJ = 1.5E-7 NCH = 1.7E17 VTH0 = 0.5232192 +K1 = 0.6154629 K2 = 4.397909E-3 K3 = 49.5247378 +K3B = 4.7261974 W0 = 1.428416E-5 NLX = 1.990092E-7 +DVT0W = 0 DVT1W = 5.3E6 DVT2W = -0.032 +DVT0 = 5.6285572 DVT1 = 0.8617134 DVT2 = -0.0569348 +U0 = 434.5143164 UA = 1.066678E-10 UB = 1.842089E-18 +UC = 6.794094E-11 VSAT = 1.287889E5 A0 = 0.9907028 +AGS = 0.2642984 B0 = 1.894576E-6 B1 = 5E-6 +KETA = 1.06235E-3 A1 = 0 A2 = 1 +RDSW = 976.0244735 PRWG = 2.031257E-3 PRWB = -1E-3 +WR = 1 WINT = 5.506511E-8 LINT = 2.410167E-9 +XL = -5E-8 XW = 0 DWG = -1.243637E-8 +DWB = 5.537948E-9 VOFF = -0.1310071 NFACTOR = 0.9944094 +CIT = 0 CDSC = 1.527511E-3 CDSCD = 0 +CDSCB = 0 ETA0 = 1.520266E-3 ETAB = 0 +DSUB = 0.1067061 PCLM = 0.8764469 PDIBLC1 = 0.5431391 +PDIBLC2 = 4.15356E-3 PDIBLCB = 0 DROUT = 0.996452 +PSCBE1 = 7.253118E9 PSCBE2 = 5E-10 PVAG = 0.1772609 +DELTA = 0.01 MOBMOD = 1 PRT = 0 +UTE = -1.5 KT1 = -0.11 KT1L = 0 +KT2 = 0.022 UA1 = 4.31E-9 UB1 = -7.61E-18 +UC1 = -5.6E-11 AT = 3.3E4 WL = 0 +WLN = 1 WW = 0 WWN = 1 +WWL = 0 LL = 0 LLN = 1 +LW = 0 LWN = 1 LWL = 0 +CAPMOD = 2 CGDO = 3.97E-10 CGSO = 3.97E-10 +CGBO = 0 CJ = 9.231271E-4 PB = 0.8509074 +MJ = 0.3818435 CJSW = 1.840483E-10 PBSW = 0.9887463 +MJSW = 0.1583859 PVTH0 = -0.0115229 PRDSW = -139.443262 +PK2 = 3.497665E-4 WKETA = -1.09799E-3 LKETA = -7.09023E-3 ) * .MODEL CMOSP PMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 7.9E-9 +XJ = 1.5E-7 NCH = 1.7E17 VTH0 = -0.5773342 +K1 = 0.6851522 K2 = -0.015814 K3 = 54.9959774 +K3B = -6.392933 W0 = 1.353397E-5 NLX = 3.259423E-8 +DVT0W = 0 DVT1W = 5.3E6 DVT2W = -0.032 +DVT0 = 1.8077644 DVT1 = 0.7116117 DVT2 = -0.1942173 +U0 = 122.0322683 UA = 1.131015E-9 UB = 1.238597E-18 +UC = -4.36690E-11 VSAT = 1.254613E5 A0 = 0.9768805 +AGS = 0.2600292 B0 = 1.946103E-6 B1 = 5E-6 +KETA = -0.0183802 A1 = 0 A2 = 1 +RDSW = 1.740457E3 PRWG = 0.0187585 PRWB = -1E-3 +WR = 1 WINT = 4.805045E-8 LINT = 7.784353E-9 +XL = -5E-8 XW = 0 DWG = -1.599628E-8 +DWB = -2.345079E-9 VOFF = -0.132244 NFACTOR = 1.2424817 +CIT = 0 CDSC = 1.413317E-4 CDSCD = 0 +CDSCB = 0 ETA0 = 0.262249 ETAB = -3.889763E-3 +DSUB = 0.6766373 PCLM = 1.1752302 PDIBLC1 = 4.866975E-3 +PDIBLC2 = 9.081719E-3 PDIBLCB = 2.37525E-3 DROUT = 0 +PSCBE1 = 2.01277E10 PSCBE2 = 8.854846E-9 PVAG = 1.1037883 +DELTA = 0.01 MOBMOD = 1 PRT = 0 +UTE = -1.5 KT1 = -0.11 KT1L = 0 +KT2 = 0.022 UA1 = 4.31E-9 UB1 = -7.61E-18 +UC1 = -5.6E-11 AT = 3.3E4 WL = 0 +WLN = 1 WW = 0 WWN = 1 +WWL = 0 LL = 0 LLN = 1 +LW = 0 LWN = 1 LWL = 0 +CAPMOD = 2 CGDO = 4.73E-10 CGSO = 4.73E-10 +CGBO = 0 CJ = 8.512763E-4 PB = 0.99 +MJ = 0.5834851 CJSW = 2.199595E-10 PBSW = 0.99 +MJSW = 0.3015142 PVTH0 = 7.748955E-3 PRDSW = -250.1583 +PK2 = -2.868919E-4 WKETA = 3.674392E-3 LKETA = -0.010084 ) * Download Text File